Beam current calibration system

Details Beam current calibration system Beam current calibration system

2011-07-19

2011-07-19

Kim, Robert (Department: 2881)

Radiant energy

Calibration or standardization methods

C250S311000

Reexamination Certificate

active

07982179

ABSTRACT:
A charged particle beam device is described. The charged particle beam device includes an emitter adapted for emitting a primary charged particle beam, a specimen location adapted for holding a specimen, from which secondary and/or backscattered charged particles are released on impingement of the primary charged particle beam, a detection unit adapted for detecting the secondary particles and/or secondary particles, and a beam guiding unit adapted for guiding the primary charged particle beam to the detection unit for impingement of a primary charged particle beam on the detection unit.

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