Optical: systems and elements – Signal reflector – 3-corner retroreflective
Reexamination Certificate
2011-04-19
2011-04-19
Cherry, Euncha P (Department: 2872)
Optical: systems and elements
Signal reflector
3-corner retroreflective
Reexamination Certificate
active
07926959
ABSTRACT:
Methods and apparatus relating to electromagnetic beam (e.g., laser beam) conditioning are described. In an embodiment, electromagnetic beam conditioning may be performed utilizing reflectors to temporally differentiate electromagnetic beam subsections and sub-beams resulting in reduced spatial coherence of the beam. Other embodiments are also described.
REFERENCES:
patent: 7045278 (2006-05-01), Ihara et al.
patent: 2002/0154408 (2002-10-01), Minoura et al.
Alles David
Jiang Wu
Kvamme Damon
Lee Chun
Cherry Euncha P
Kla-Tencor Corporation
Luedeka Neely & Graham P.C.
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