Metal working – Method of mechanical manufacture – Electrical device making
Reexamination Certificate
2007-02-27
2009-12-29
Hong, John C (Department: 3726)
Metal working
Method of mechanical manufacture
Electrical device making
C324S754090
Reexamination Certificate
active
07637006
ABSTRACT:
A method for fabricating beams for a probe card includes dividing a large beam panel into smaller sub-panels before attaching the beams to corresponding posts on a substrate. Each sub-panel may have a sufficient number of beams to test several devices under test. The beam sub-panels may be aligned to the space transformer using alignment fiducials on the beam sub-panels that correspond to opposing alignment features formed in the space transformer or other substrate. Special tie-bars may be formed between: (1) rows, for example, of beams and the frame/frame splines (i.e., quadrant tie-bars); and (2) adjacent beams within any such rows on the beam panel (i.e., beam tie-bars). The approach may also include the use of tip tie-bars and/or tail tie-bars.
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Clauberg Horst
McGlory John
Nguyen Anh-Tai Thai
Tunaboylu Bahadir
Becker Edward A.
Hickman Palermo & Truong & Becker LLP
Hong John C
SV Probe Pte. Ltd.
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