Beam alignment correction element assembly

Details Beam alignment correction element assembly Beam alignment correction element assembly

1996-07-29

1999-06-01

Epps, Georgia

Optical: systems and elements

Lens

With support

359822, G02B 702

Patent

active

059093234

ABSTRACT:
A correction element assembly for correcting misalignment of a beam of radiation with respect to a location on a target, includes a housing having a correction element fixedly mounted therein. A flexure is attached to the housing and at least two drive devices are disposed radially around the housing. Each of the drive devices is operable to apply a force to the housing to thereby deflect the flexure causing the housing to move such that said correction element moves in a cyclic fashion about its beam axis.

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