BAW resonator bi-layer top electrode with zero etch undercut

Details BAW resonator bi-layer top electrode with zero etch undercut BAW resonator bi-layer top electrode with zero etch undercut

2008-04-01

2010-06-15

SanMartin, J. (Department: 2837)

Electrical generator or motor structure

Non-dynamoelectric

Piezoelectric elements and devices

C310S320000

Reexamination Certificate

active

07737612

ABSTRACT:
A piezoelectric resonator includes a multi-layer top electrode configured such that a top most layer protects the underlying layers from subsequent etching, thereby preventing etch undercut of the top-most layer. In one embodiment, the multi-layer top electrode is configured as a bi-layer, so that the upper layer of the bi-layer stack protects all sides of the underlying layer from subsequent etch process steps. In an alternative embodiment, at least the perimeter of a multi-layer top electrode is completely covered with overlapping interconnect metal.

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