BAW resonator bi-layer top electrode with zero etch undercut

Details BAW resonator bi-layer top electrode with zero etch undercut BAW resonator bi-layer top electrode with zero etch undercut

2006-05-25

2009-10-13

Tugbang, A. Dexter (Department: 3729)

Metal working

Piezoelectric device making

C029S594000, C029S847000, C310S364000, C310S365000, C216S013000

Reexamination Certificate

active

07600303

ABSTRACT:
A method of fabricating a BAW piezoelectric resonator, the method comprising the steps of providing a bottom electrode and a piezoelectric layer coupled to the bottom electrode. A bottom metal layer is deposited on a top electrode on the piezoelectric layer. The bottom metal layer is patterned and etched. A top metal layer of the top electrode is deposited on the etched bottom metal layer. The top metal layer is patterned and layered such that the top metal layer completely covers the top and sides of the bottom metal layer.

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