BAW resonator

Wave transmission lines and networks – Coupling networks – Electromechanical filter

Reexamination Certificate

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C333S191000

Reexamination Certificate

active

11068522

ABSTRACT:
A BAW resonator includes a resonator region having a piezo-electric layer between two excitation electrodes, wherein an acoustic standing wave forms when operating the BAW resonator at a resonant frequency. Furthermore, the BAW resonator includes a leaky wave reflection structure formed to reflect leaky waves generated when operating the BAW resonator, wherein the leaky waves propagate in a direction differing from a propagation direction of the acoustic standing wave.

REFERENCES:
patent: 6424237 (2002-07-01), Ruby et al.
patent: 6509813 (2003-01-01), Ella et al.
patent: 6534900 (2003-03-01), Aigner et al.
patent: 6774746 (2004-08-01), Whatmore et al.
patent: 6842088 (2005-01-01), Yamada et al.
patent: 6975183 (2005-12-01), Aigner et al.
patent: 6977563 (2005-12-01), Komuro et al.
Thalhammer et al., “Prediction of BAW Resonator Performance Using Experimental and Numerical Methods”, 2004 IEE Ultrasonics Symposium, vol. 1, Aug. 2004, pp. 282-285, (4 pages).

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