BAW device and method for switching a BAW device

Details BAW device and method for switching a BAW device BAW device and method for switching a BAW device

2006-08-29

2006-08-29

Budd, Mark (Department: 2834)

Electrical generator or motor structure

Non-dynamoelectric

Piezoelectric elements and devices

C310S320000

Reexamination Certificate

active

07098575

ABSTRACT:
A method for switching a bulk acoustic device is disclosed. The bulk acoustic device has a substrate, a first electrode, a second electrode, and a piezoelectric film between the first and the second electrode. Switching is obtained by controlling the polarization of the piezoelectric film, through application of a DC voltage difference to the first and second electrodes. Therefore, no additional switches are needed to direct and control the RF signals passing through the device.

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Arscott, S., et al., “Lead Zirconate Titanate Thin Films on GaAs for Microwave Device Applications,”Proceedings of the 5th International Conference on Solid State and Integrated Circuit Technology, Beijing, China, p. 587 (1998).
Brooks, K.G., et al., “Orientation of Rapid Thermally Annealed Lead Zirconate Titanate Thin Films on (111) Pt Substrates,”J. Mater. Res., vol. 9, No. 10, p. 2540 (1996).
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Uchino, K.,Piezoelectric Actuators and Ultrasonic Motors, Kluwer Academic Publishers, Boston, pp. 70-117 and pp. 128-129 (1997).

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