Material or article handling – Device for emptying portable receptacle – Nongravity type
Reexamination Certificate
2011-08-23
2011-08-23
Keenan, James (Department: 3652)
Material or article handling
Device for emptying portable receptacle
Nongravity type
C414S404000, C414S416080, C414S811000, C414S938000
Reexamination Certificate
active
08002511
ABSTRACT:
A batch forming apparatus forms a batch of substrates by combining a plurality of substrates that have been taken out from a plurality of carriers each containing therein the substrates in a stacked manner. The batch forming apparatus includes: a substrate transfer mechanism that takes out the substrates from each carrier and transfer the substrates; a substrate relative positional relationship changing mechanism that rearranges one or more substrates out of the substrates transferred by the substrate transfer mechanism one by one relative to other substrates to change positional relationships of the substrates relative to each other; and a batch forming mechanism that forms a batch of substrates out of the substrates that have been transferred thereto by the substrate transfer mechanism, with positional relationships of the substrates having been changed relative to each other by the substrate relative positional relationship changing mechanism. A substrate processing system includes such a batch forming apparatus, and a substrate processing apparatus that process the batch of substrates formed by the batch forming apparatus.
REFERENCES:
patent: 3949891 (1976-04-01), Butler et al.
patent: 5125784 (1992-06-01), Asano
patent: 5153841 (1992-10-01), Goff et al.
patent: 6055694 (2000-05-01), Steere
patent: 6092971 (2000-07-01), Balg et al.
patent: 6345947 (2002-02-01), Egashira
patent: 6354794 (2002-03-01), Sato et al.
patent: 6543982 (2003-04-01), Nichols et al.
patent: 6612801 (2003-09-01), Koguchi
patent: 2001/0048867 (2001-12-01), Lebar et al.
patent: 2003/0164179 (2003-09-01), Kamikawa et al.
patent: 2004/0026694 (2004-02-01), Blattner et al.
patent: 62-33437 (1987-02-01), None
patent: 11-354604 (1999-12-01), None
patent: 2002-64075 (2002-02-01), None
patent: 2002-064075 (2002-02-01), None
patent: 2003-257923 (2003-09-01), None
patent: 2005-85896 (2005-03-01), None
patent: WO 00/03417 (2000-01-01), None
Egashira Koji
Kamikawa Yuji
Keenan James
Smith , Gambrell & Russell, LLP
Tokyo Electron Limited
LandOfFree
Batch forming apparatus, substrate processing system, batch... does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Batch forming apparatus, substrate processing system, batch..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Batch forming apparatus, substrate processing system, batch... will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-2646319