Basic stripping and cleaning composition

Cleaning and liquid contact with solids – Processes – Including application of electrical radiant or wave energy...

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Details

252 794, 252 793, 1566591, H01L 21302, B08B 308

Patent

active

057097569

ABSTRACT:
An aqueous and basic stripping and cleaning composition is provided which contains a hydroxylamine, ammonium fluoride, water and optionally DMSO. The pH of the composition is greater than about 8. Also provided is a method of stripping and cleaning utilizing the compositions of the invention.

REFERENCES:
patent: 4230523 (1980-10-01), Gajda
patent: 5279771 (1994-01-01), Lee
patent: 5320709 (1994-06-01), Bowden et al.
patent: 5334332 (1994-08-01), Lee
patent: 5417877 (1995-05-01), Ward
patent: 5419779 (1995-05-01), Ward
patent: 5482566 (1996-01-01), Lee
patent: 5556482 (1996-09-01), Ward et al.

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