Base plate with electrodes, process for producing the same,...

Electric heating – Metal heating – By arc

Reexamination Certificate

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C313S504000

Reexamination Certificate

active

08003913

ABSTRACT:
Electrodes are formed in a predetermined pattern on a base plate. Side face regions of each electrode or certain regions of each electrode, which certain regions contain the side face regions and neighboring regions, have a composition different from the composition of the other region and have insulation characteristics. The base plate with electrodes is produced with a process wherein a conductor layer is formed on the base plate, a resist pattern is formed on the conductor layer, the conductor layer is etched with the resist pattern acting as a mask, the electrodes being thereby formed in the predetermined pattern, and an insulation characteristics imparting processing gas is brought into contact with the electrodes.

REFERENCES:
patent: 6690108 (2004-02-01), Yamaguchi et al.
patent: 6864628 (2005-03-01), Yamazaki et al.
patent: 2004/0009303 (2004-01-01), Ito et al.
patent: 2005/0003567 (2005-01-01), Yasukawa et al.
patent: 2005/0057154 (2005-03-01), Masumo
patent: 2006/0223256 (2006-10-01), Saitoh et al.
patent: 2006/0244368 (2006-11-01), Nagayama et al.
patent: 2002-025781 (2002-01-01), None
patent: 2002-359083 (2002-12-01), None
patent: 2002359083 (2002-12-01), None
patent: 2004-259561 (2004-09-01), None
patent: 2005004550 (2005-01-01), None
Office Action issued in JP 2005149593 dated Nov. 2, 2010.

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