Barrier layers for microelectromechanical systems

Details Barrier layers for microelectromechanical systems Barrier layers for microelectromechanical systems

2005-02-01

2005-02-01

Nelms, David (Department: 2818)

Semiconductor device manufacturing: process

Manufacture of electrical device controlled printhead

C257S536000

Reexamination Certificate

active

06849471

ABSTRACT:
A method for processing microelectromechanical devices is disclosed herein. The method prevents the diffusion and interaction between sacrificial layers and structure layers of the microelectromechanical devices by providing selected barrier layers between consecutive sacrificial and structure layers.

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