Barium titanate film synthesizing process

Details Barium titanate film synthesizing process Barium titanate film synthesizing process

2006-07-18

2006-07-18

King, Roy (Department: 1742)

Electrolysis: processes, compositions used therein, and methods

Electrolytic coating

Forming nonelectrolytic coating before forming nonmetal...

C205S316000, C205S333000, C205S538000

Reexamination Certificate

active

07077943

ABSTRACT:
A new technique to synthesize barium titanate (BaTiO3) on homogeneous substrates (titanium) or heterogeneous substrates (silicon wafers, metal, glass, ceramics, polymers, other metals, etc.) is disclosed to include a first step to deposit a titanium film on a substrate by sputtering, and a second step to synthesize barium titanate film with uniformly dispersed spherical particles on the titanium-coated substrate in a electrolyte containing barium ions by electrochemically anodic oxidation.

REFERENCES:
patent: 6344411 (2002-02-01), Yamada et al.
Wu, C.Y.; Lu, F.H. Thin Solid Films 2001, 398-399, p. 621-625.
Mattox, D.M. “Thin Films, Film Formation Techniques.” Kirk-Othmer Encyclopedia of Chemical Technology 1997. Accessed online. DOI; 10.1002/0471238961.0609121313012020.a01.

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