Barium strontium .beta.-diketonates, processes for producing the

Details Barium strontium .beta.-diketonates, processes for producing the Barium strontium .beta.-diketonates, processes for producing the

1999-02-17

2000-04-04

Nazario-Gonzalez, Porfirio

Organic compounds -- part of the class 532-570 series

Organic compounds

Heavy metal containing

556 28, 42725532, C07F 300, C23C 1606

Patent

active

060463457

ABSTRACT:
Novel one-source compounds for producing (Ba,Sr)TiO.sub.3 films having high dielectric constants and ferroelectric (Sr,Ba)Nb.sub.2 O.sub.6 films by the CVD method, which are in the form of a liquid at the source temperature and contain Ba and Sr at a specified ratio; processes for producing these novel compounds; and processes for producing films by using the same.
Because of having a melting point of 160.degree. C., being in the form of a liquid and having enough vapor pressure at 200.degree. C., the novel compounds barium strontium .beta.-diketonate [Ba.sub.2 Sr(dpm).sub.6 and BaSr.sub.2 (dpm).sub.6 ] can be quantitatively supplied by gas bubbling as a feedstock in the CVD method while maintaining the Ba/Sr ratio at a constant ratio. Thus, barium strontium-containing oxide dielectric films can be produced at a high reproducibility by thermal decomposition on a substrate in an oxidative atmosphere. These compounds can be produced by reacting dpmh with Ba and Sr, Ba(dpm).sub.2 with Sr(dpm).sub.2, or dpmH with Ba and Sr(dpm).sub.2 and then subjecting either of the reaction products thus obtained to high-vacuum distillation.

REFERENCES:
Schwarberg et al., Analytical Chemistry, vol. 42, No. 14, pp. 1828-1830, Dec. 1970.

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