Barium fluoride high repetition rate UV excimer laser

Details Barium fluoride high repetition rate UV excimer laser Barium fluoride high repetition rate UV excimer laser

2005-01-04

2005-01-04

Harvey, Minsun Oh (Department: 2828)

Coherent light generators

Particular active media

Gas

C372S055000

Reexamination Certificate

active

06839374

ABSTRACT:
The invention relates to an excimer laser which includes a source of a laser beam and one or more windows which include barium fluoride. Another aspect of the invention relates to an excimer laser which includes a source of a laser beam, one or more windows which include barium fluoride and a source for annealing the one or more windows. Another aspect of the invention relates to a method of producing a predetermined narrow width laser beam.

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