Bar code recipe selection system using workstation controllers

Details Bar code recipe selection system using workstation controllers Bar code recipe selection system using workstation controllers

1994-06-17

1995-07-11

Ruggiero, Joseph

Boots, shoes, and leggings

36447411, 235375, G06F 1760, G06F 1900

Patent

active

054327024

ABSTRACT:
A barcode processing system for a semiconductor wafer, comprising a workstation controller, a bar code reader attached to the workstation controller for reading a bar code assigned to the wafer, a tool assigned to the workstation controller for processing the wafer, and a host computer assigned to the tool and the workstation controller for determining the appropriate process to be performed on the wafer.
The bar code read by the bar code reader is sent to the workstation controller, and the workstation controller requests processing information from the host computer, wherein that request includes information obtained from the bar code read by the bar code reader and sent to the workstation controller. The host computer determines an appropriate process step, or recipe, to be applied to the wafer based upon the information received from the processing information request from the workstation controller, and sends this information to the workstation controller.
The workstation controller determines an appropriate process associated with this process step. Once the workstation controller has the appropriate process to be applied to the wafer, the workstation controller determines if that process can be performed by the tool associated with the workstation controller. If the process can be performed by the tool, the recipe is sent to the tool so that the tool has the information it needs to process the wafer.

REFERENCES:
patent: 4472783 (1984-09-01), Johnstone et al.
patent: 4974166 (1990-11-01), Maney et al.
patent: 5121331 (1992-06-01), Lourenich
patent: 5150288 (1992-09-01), Imai et al.
patent: 5231585 (1993-07-01), Kobayashi et al.

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