Optics: measuring and testing – By light interference – Spectroscopy
Reexamination Certificate
2006-03-31
2010-06-08
Turner, Samuel A (Department: 2877)
Optics: measuring and testing
By light interference
Spectroscopy
C356S519000
Reexamination Certificate
active
07733494
ABSTRACT:
A method and apparatus for estimating bandwidth of laser output light is described which may include a dispersive element producing a dispersed output having a plurality of spectrum images from at least a portion of the laser output light. An array of light detecting elements is oriented to receive the dispersed output together with a shifting mechanism that moves the array, the dispersed output, or both, relative to each other. Electronics may be provided for determining the widths of at least two spectrum images at different phases of registration between the spectrum images and light detector elements and for averaging the widths to estimate a laser output bandwidth. The-spectrum images formed by the laser output light may be under-sampled, e.g., in the spatial or time domains.
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Cymer Inc.
Turner Samuel A
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