Ball screw supported Z stage

Details Ball screw supported Z stage Ball screw supported Z stage

1989-06-14

1991-04-23

Wieder, Kenneth

Electricity: measuring and testing

Measuring, testing, or sensing electricity, per se

With rotor

324158P, 269 21, 279 3, 74529, G01R 102, G01R 104

Patent

active

050102958

ABSTRACT:
A ball screw supported Z stage for use in a wafer prober is disclosed. The present invention provides the capability of precisely positioning and rigidly supporting a work surface in a low profile package.

REFERENCES:
patent: 3050617 (1962-08-01), Lasch
patent: 3437929 (1969-04-01), Glenn
patent: 3499640 (1970-03-01), Berz
patent: 3499714 (1970-03-01), Schellenberg
patent: 3628120 (1971-12-01), Frederiksen
patent: 3689892 (1972-09-01), Glenn et al.
patent: 3851249 (1974-11-01), Roch
patent: 3936743 (1976-02-01), Roch
patent: 4030527 (1977-06-01), Roch
patent: 4056777 (1977-11-01), Roch
patent: 4066943 (1978-01-01), Roch
patent: 4425037 (1984-01-01), Hershel et al.
patent: 4448403 (1984-05-01), Riessland et al.
patent: 4530635 (1985-07-01), Engelbrecht et al.
patent: 4542298 (1985-09-01), Holden
patent: 4560880 (1985-12-01), Petric et al.
patent: 4567938 (1986-02-01), Turner
patent: 4607525 (1986-08-01), Turner et al.
patent: 4818169 (1989-04-01), Schram et al.

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