Balancing pressure to improve a fluid seal

Details Balancing pressure to improve a fluid seal Balancing pressure to improve a fluid seal

2005-11-02

2010-06-01

Bell, Bruce F (Department: 1795)

Chemistry: electrical and wave energy

Apparatus

Electrolytic

C204S297100, C204S297010, C204S297030

Reexamination Certificate

active

07727366

ABSTRACT:
A method and apparatus for fluid sealing a workpiece retained by a workpiece holder are described. A pressure differential can be formed across a fluid seal to counteract fluid attempting to penetrate the fluid seal, which can contaminate the underside of the workpiece. The apparatus can include a ring forming a barrier to fluid entry with the workpiece and a source providing pressure to form the pressure differential. The pressure or the pressure differential can counteract hydroscopic fluid pressure or hydrostatic fluid pressure that is acting to force fluid through the barrier between the ring and the workpiece.

REFERENCES:
patent: 1749953 (1930-03-01), Lichtman
patent: 3053424 (1962-09-01), Reinhard
patent: 3503856 (1970-03-01), Blackmore
patent: 4068162 (1978-01-01), Robinson
patent: 4102756 (1978-07-01), Castellani et al.
patent: 4304641 (1981-12-01), Grandia et al.
patent: 4654089 (1987-03-01), Singelyn et al.
patent: 4696729 (1987-09-01), Santini
patent: 4964964 (1990-10-01), Murphy
patent: 5024746 (1991-06-01), Stierman et al.
patent: 5048201 (1991-09-01), Layton
patent: 5227041 (1993-07-01), Brogden et al.
patent: 5268035 (1993-12-01), Neubauer et al.
patent: 5273642 (1993-12-01), Crites et al.
patent: 5312532 (1994-05-01), Andricacos et al.
patent: 5342495 (1994-08-01), Tung et al.
patent: 5421987 (1995-06-01), Tzanavaras et al.
patent: 5429733 (1995-07-01), Ishida
patent: 5447615 (1995-09-01), Ishida
patent: 5516412 (1996-05-01), Andricacos et al.
patent: 5522975 (1996-06-01), Andricacos et al.
patent: 5556479 (1996-09-01), Bran
patent: 5660699 (1997-08-01), Saito et al.
patent: 5683564 (1997-11-01), Reynolds
patent: 5807469 (1998-09-01), Crafts et al.
patent: 5899001 (1999-05-01), Layton
patent: 5927302 (1999-07-01), Hayami et al.
patent: 6017437 (2000-01-01), Ting et al.
patent: 6036833 (2000-03-01), Tang et al.
patent: 6080291 (2000-06-01), Woodruff et al.
patent: 6108932 (2000-08-01), Chai
patent: 6119305 (2000-09-01), Loveall et al.
patent: 6174011 (2001-01-01), Keigler
patent: 6193859 (2001-02-01), Contolini et al.
patent: 6251250 (2001-06-01), Keigler
patent: 6258220 (2001-07-01), Dordi et al.
patent: 6334937 (2002-01-01), Batz, Jr. et al.
patent: 6360756 (2002-03-01), Chen et al.
patent: 6372051 (2002-04-01), Adams et al.
patent: 6379511 (2002-04-01), Fatula et al.
patent: 6495005 (2002-12-01), Flake et al.
patent: 6502591 (2003-01-01), Scranton et al.
patent: 6524461 (2003-02-01), Taylor et al.
patent: 6540899 (2003-04-01), Keigler
patent: 6547937 (2003-04-01), Oberlitner et al.
patent: 6685814 (2004-02-01), Uzoh et al.
patent: 6746565 (2004-06-01), Bleck et al.
patent: 6749391 (2004-06-01), Woodruff et al.
patent: 6776887 (2004-08-01), Roberts et al.
patent: 6844274 (2005-01-01), Yoshioka et al.
patent: 6911127 (2005-06-01), Batz, Jr. et al.
patent: 6936153 (2005-08-01), Ritzdorf
patent: 7022211 (2006-04-01), Yoshioka et al.
patent: 7097749 (2006-08-01), Donovan, III et al.
patent: 7445697 (2008-11-01), Keigler et al.
patent: 2002/0027080 (2002-03-01), Yoshioka et al.
patent: 2002/0132559 (2002-09-01), Togawa
patent: 2004/0245094 (2004-12-01), McHugh et al.
patent: 2005/0089645 (2005-04-01), Keigler et al.
Andricacos et al., “Future Directions in Electroplated Materials for Thin-Film Recording,” 1998, pp. 1-10.
Brückner et al., “Evolution of Stress and Microstructure in NiFe (20 wt.%) Thin Films During Annealing,” Thin Solid Films 385 (2001), pp. 225-229.
Rasmussen et al., “Electroplating and Characterization of Cobalt-Nickel-Iron and Nickel-Iron for Magnetic Microsystems Applications,” Science, Sensors and Actuators A 92 (2001), pp. 242-248.
Song et al., “Stress Changes of Binary CoNi Alloy Films Electrodeposited from Different Anions,” Abstract from The Electrochemical Society Joint International Meeting, Oct. 5, 2004, 1 page.
Tabakovic et al., “Composition Structure, Stress, and Coercivity of Electrodeposited Soft Magnetic CoNiFe Films,”Journal of the Electrochemical Society, 149(1) (2002), pp. C18-C22.
“Automatic loading and unloading (combined),” Ludy Brochure, Mar. 2000.
“Global Support Generates Business,” Totally Integrated Automation, 2001.
Office Action for U.S. Appl. No. 10/971,726 mailed Dec. 11, 2008 (11 pages).

Affiliated with

Also associated with

Rating

Balancing pressure to improve a fluid seal does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Balancing pressure to improve a fluid seal, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Balancing pressure to improve a fluid seal will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-4155828