Photocopying – Projection printing and copying cameras – Step and repeat
Reexamination Certificate
2005-08-02
2005-08-02
Nguyen, Henry Hung (Department: 2851)
Photocopying
Projection printing and copying cameras
Step and repeat
C355S072000, C355S117000, C355S075000
Reexamination Certificate
active
06924882
ABSTRACT:
A balanced positioning system for use in lithographic apparatus having a pair of balance masses which are supported so as to be moveable in at least one degree of freedom, such as Y translation. Oppositely directed drive forces in this degree of freedom act directly between the driven body and the balance masses to rotate the driven body about an axis perpendicular to the one direction. Reaction forces arising from positioning movements result in linear movements of the balance masses and all reaction forces are kept within the balanced positioning system.
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Thomas W. Novak, A New VLSI Printer, SPIE vol. 135 Developments in Semiconductor Microlithography III, 1978, 36-44.
ASML Netherlands B.V.
Nguyen Henry Hung
Pillsbury Winthrop Shaw & Pittman LLP
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