Bakeable vacuum systems

Valves and valve actuation – Valve – Materials

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277DIG6, F16K 5102

Patent

active

048893196

ABSTRACT:
An apparatus and method providing a bakeable sealing means for a vacuum system, and thereby an improved bakeable ultra-high vacuum system; the apparatus comprising: a first sealing element composed substantially of an elastomeric material; a second sealing element comprising PTFE; and means for engaging the first sealing element with the second sealing element and for compressing the first sealing element; as for example in an improved bakeable seal between a first and a second flange, or in a gate valve, or a vacuum chamber entry lock.

REFERENCES:
patent: 4553562 (1985-11-01), Nohada
patent: 4572233 (1986-02-01), Weeden

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