Bakeable cryopump

Details Bakeable cryopump Bakeable cryopump

1983-03-21

1985-04-30

Sever, Frank

Refrigeration

Storage of solidified or liquified gas

With sorbing or mixing

62 555, 62268, F17C 702

Patent

active

045142041

ABSTRACT:
A bakeable cryopump having a housing and means to removeably receive the displacer end of a cryogenic refrigerator to cool internal cryopanels said cryopumps adapted for removal of the refrigerator without loss of vacuum inside the cryopump and further adapted to be heated under vacuum to remove pumped gases primarily water so that the cryopumps after cooling can be used at vacuum of at least 10.sup.-10 Torr.

REFERENCES:
patent: 3620029 (1971-11-01), Longsworth
patent: 4150549 (1979-04-01), Longsworth
patent: 4219588 (1980-04-01), Longsworth

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