Bake system

Details Bake system Bake system

2008-01-08

2008-01-08

Pelham, J. (Department: 3742)

Electric heating

Heating devices

Combined with container, enclosure, or support for material...

C392S416000, C392S418000, C118S725000, C118S729000

Reexamination Certificate

active

11156530

ABSTRACT:
Provided is a bake system. The bake system includes a heating plate having a heating plate having a substrate on an upper surface. A case is disposed below the heating plate to support the heating plate; a first cover is disposed above the heating plate and coupled to the case to form a chamber; and a second cover is disposed in the first cover, and directly above the substrate in the bake process for preventing heat convection on the substrate.

REFERENCES:
patent: 5837555 (1998-11-01), Kaltenbrunner et al.
patent: 5872889 (1999-02-01), Kaltenbrunner et al.
patent: 6633022 (2003-10-01), Kitano et al.
patent: 6884066 (2005-04-01), Nguyen et al.
patent: 6969829 (2005-11-01), Tsuruno et al.
patent: 7009148 (2006-03-01), Kawano et al.
patent: 2001/0011653 (2001-08-01), Shirakawa et al.
patent: 2002/0047004 (2002-04-01), Johnsgard et al.
patent: 1999-0037189 (1999-10-01), None

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