Bake plate lid cleaner and cleaning method

Details Bake plate lid cleaner and cleaning method Bake plate lid cleaner and cleaning method

2007-03-22

2010-06-22

Pelham, Joseph M (Department: 3742)

Electric heating

Heating devices

Combined with container, enclosure, or support for material...

C118S070000, C134S061000, C134S152000, C134S902000

Reexamination Certificate

active

07741583

ABSTRACT:
A method and system for positioning a wafer on a bake plate in a processing module that includes lowering a bake plate cover assembly over the wafer during a baking process, raising the bake plate cover assembly after the baking process, removing the wafer, determining whether the bake plate cover assembly requires cleaning, then either processing another wafer if the cover assembly does not need cleaning or establishing a cleaning process for the bake plate cover assembly if the cover does need cleaning. Automated sensing of the state of the cover assembly may be employed, and cleaning process may be automatically performed in response to the cleaning need determination.

REFERENCES:
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patent: 5718763 (1998-02-01), Tateyama et al.
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patent: 6391110 (2002-05-01), Satou et al.
patent: 7515264 (2009-04-01), Otsuki et al.
patent: 2007/0166655 (2007-07-01), Ooshima et al.

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