Bake plate having engageable thermal mass

Details Bake plate having engageable thermal mass Bake plate having engageable thermal mass

2007-09-25

2007-09-25

Paik, Sang (Department: 3742)

Electric heating

Heating devices

Combined with container, enclosure, or support for material...

C118S724000, C165S080100

Reexamination Certificate

active

11174681

ABSTRACT:
A bake station comprising a bake plate adapted to heat a substrate supported on an upper surface of the bake plate, the bake plate vertically moveable between an upper baking position and a lower cooling position; and a plurality of heat sinks adapted to be engageably coupled to a lower surface of the bake plate when the bake plate is in the lower cooling position.

REFERENCES:
patent: 6518548 (2003-02-01), Sugaya et al.
patent: 6624393 (2003-09-01), Howell et al.
patent: 6639189 (2003-10-01), Ramanan et al.
patent: 6717115 (2004-04-01), Pfahnl et al.

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