Baffled collet for vacuum pick-up of a semiconductor die

Details Baffled collet for vacuum pick-up of a semiconductor die Baffled collet for vacuum pick-up of a semiconductor die

1994-11-30

1996-05-14

Bishop, Steven C.

Chucks or sockets

Vacuum

228 447, 269 21, 294 641, B25B 1100

Patent

active

055161251

ABSTRACT:
A vacuum collet (10) for picking up a semiconductor die (11). A plate (12) has a vacuum tube (15) and a downwardly extending skirt (19). Skirt (19) contacts the perimeter of die (11). The vacuum is distributed to the perimeter of the semiconductor die (10) by a baffle (16) interposed between the plate (12) and the die (11) and within the skirt (19).

REFERENCES:
patent: 4588473 (1986-05-01), Hisatomi et al.
patent: 4903717 (1990-02-01), Sumnitsch
"Vacuum-Operated Greensheet Handler", I. J. DeRobertis et al., IBM Technical Disclosure Bulletin, vol. 24, No. 4 (Sep. 1981).

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