Stock material or miscellaneous articles – Composite – Of silicon containing
Reexamination Certificate
2011-07-05
2011-07-05
McNeil, Jennifer C (Department: 1784)
Stock material or miscellaneous articles
Composite
Of silicon containing
C428S220000
Reexamination Certificate
active
07972703
ABSTRACT:
Baffle wafers of polycrystalline silicon are placed in non-production slots of a support tower for thermal processing monocrystalline silicon wafers. The polycrystalline silicon is preferably randomly oriented Czochralski polysilicon grown using a randomly oriented seed, for example, CVD grown silicon. An all-silicon hot zone of a thermal furnace may include a silicon support tower placed within a silicon liner and supporting the polysilicon baffle wafers with silicon injector tube providing processing gas within the liner. The randomly oriented polysilicon may be used for other parts requiring a rugged member, for example, within a silicon processing chamber and for structural members.
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Boyle James E.
Cadwell Tom L.
Mytton Robert W.
Reynolds Reese
Zehavi Ranaan Y.
Ferrotec (USA) Corporation
Langman Jonathan C
McNeil Jennifer C
Mesmer & Deleault, PLLC
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