Baffle configurations for molecular drag vacuum pumps

Details Baffle configurations for molecular drag vacuum pumps Baffle configurations for molecular drag vacuum pumps

2007-05-29

2007-05-29

Look, Edward K. (Department: 3745)

Rotary kinetic fluid motors or pumps

Smooth runner surface for working fluid frictional contact

Reexamination Certificate

active

11053560

ABSTRACT:
A molecular drag compressor includes a rotor disk coupled to a drive shaft for rotation about an axis, a stator disposed about the rotor disk, the stator defining a tangential flow channel, an inlet to the tangential flow channel and an outlet from the tangential flow channel, and a stationary baffle disposed in the tangential flow channel adjacent to the outlet. The baffle and the rotor disk have a gap between them. A surface of the baffle facing the rotor disk has cavities configured to produce turbulent gas flow through the gap between the baffle and the rotor disk and to thereby reduce leakage.

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