Active solid-state devices (e.g. – transistors – solid-state diode – Responsive to non-electrical signal – Electromagnetic or particle radiation
Reexamination Certificate
2006-05-09
2006-05-09
Ngô, Ngân V. (Department: 2818)
Active solid-state devices (e.g., transistors, solid-state diode
Responsive to non-electrical signal
Electromagnetic or particle radiation
C257S010000, C257S291000, C257S433000, C257S434000
Reexamination Certificate
active
07042060
ABSTRACT:
Backthinning in an area selective manner is applied to imaging sensors12for use in electron bombarded devices. A further arrangement results in an array of collimators51aligned with pixels42or groups of pixels providing improved image contrast of such image sensor. Provision of a thin P-doped layer52on the illuminated rear surface provides both a diffusion barrier resulting in improved resolution and a functional shield for reference pixels. A gradient in concentration of P-doped layer52optimizes electron collection at the pixel array.
REFERENCES:
patent: 3631303 (1971-12-01), Antypas et al.
patent: 4000503 (1976-12-01), Matare
patent: 4348690 (1982-09-01), Jastrzebski et al.
patent: 4686555 (1987-08-01), Yusa et al.
patent: 4687922 (1987-08-01), Lemonier et al.
patent: 4760031 (1988-07-01), Janesick et al.
patent: 5244817 (1993-09-01), Hawkins et al.
patent: 5495141 (1996-02-01), Thomas
patent: 5501893 (1996-03-01), Laermer et al.
patent: 5688715 (1997-11-01), Sexton et al.
patent: 5852322 (1998-12-01), Speckbacher
patent: 6020646 (2000-02-01), Boyle et al.
patent: 6168965 (2001-01-01), Malinovich et al.
patent: 6169319 (2001-01-01), Malinovich et al.
patent: 6285018 (2001-09-01), Aebi et al.
patent: 6307586 (2001-10-01), Costello
patent: 6459078 (2002-10-01), Fowler
patent: 6483231 (2002-11-01), Iosue
patent: 6489992 (2002-12-01), Savoye
patent: 2003/0016296 (2003-01-01), Watanabe
VLSI Technology (Second Edition) by S. M. Sze, McGraw-Hill series in electrical engineering.
Copyright dated 1988, pp. 14-23 and 206-212.
Brown David W.
Chung Yun
Costello Kenneth A
Fairbairn Kevin P.
Gober Patricia
Cole Stanley Z
Intevac, Inc.
Ngo Ngan V.
LandOfFree
Backside thinning of image array devices does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Backside thinning of image array devices, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Backside thinning of image array devices will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-3646506