Backside thinning of image array devices

Details Backside thinning of image array devices Backside thinning of image array devices

2006-02-28

2006-02-28

Ngô, Ngân V. (Department: 2818)

Radiant energy

Electron energy analysis

C250S338400, C257S443000

Reexamination Certificate

active

07005637

ABSTRACT:
Backthinning in an area selective manner is applied to imaging sensors12for use in electron bombarded devices. A further arrangement results in an array of collimators51aligned with pixels42or groups of pixels providing improved image contrast of such image sensor. Provision of a thin P-doped layer52on the illuminated rear surface provides both a diffusion barrier resulting in improved resolution and a functional shield for reference pixels. A gradient in concentration of P-doped layer52optimizes electron collection at the pixel array.

REFERENCES:
patent: 3631303 (1971-12-01), Antypas et al.
patent: 4000503 (1976-12-01), Matare
patent: 4348690 (1982-09-01), Jastrzebski et al.
patent: 4686555 (1987-08-01), Yusa et al.
patent: 4687922 (1987-08-01), Lemonier et al.
patent: 4760031 (1988-07-01), Janesick et al.
patent: 5244817 (1993-09-01), Hawkins et al.
patent: 5495141 (1996-02-01), Thomas
patent: 5501893 (1996-03-01), Laermer et al.
patent: 5688715 (1997-11-01), Sexton et al.
patent: 5852322 (1998-12-01), Speckbacher
patent: 6020646 (2000-02-01), Boyle et al.
patent: 6168965 (2001-01-01), Malinovich et al.
patent: 6169319 (2001-01-01), Malinovich et al.
patent: 6285018 (2001-09-01), Aebi et al.
patent: 6307586 (2001-10-01), Costello
patent: 6459078 (2002-10-01), Fowler
patent: 6483231 (2002-11-01), Iosue
patent: 6489992 (2002-12-01), Savoye
patent: 6750964 (2004-06-01), Levenson et al.
VLSI Technology (Second Edition) by S. M. Sze, McGraw-Hill series in electrical engineering, Copyright dated 1988, pp. 14-23 and 206-212.

Affiliated with

Also associated with

Rating

Backside thinning of image array devices does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Backside thinning of image array devices, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Backside thinning of image array devices will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-3634618