Backside illuminated MSM device method

Details Backside illuminated MSM device method Backside illuminated MSM device method

1994-07-14

1996-02-27

Picardat, Kevin M.

Fishing, trapping, and vermin destroying

437 3, 437 6, 437209, 437974, 148DIG135, H01L 3118

Patent

active

054948339

ABSTRACT:
An improved Metal Semiconductor Metal (MSM) photodiode device and a fabrication process for realizing this device. The improved photodiode device employs frontside electrodes and backside illumination to avoid active area shadowing in the device. This configuration is achieved through a device fabrication sequence which involves substrate removal--and replacement at the device's opposed frontside surface using such media as an epoxy adhesive. The disclosed device uses gallium arsenide semiconductor materials that are lattice determined by an indium phosphide sacrificial initial substrate, in order to select a desired input energy spectral range.

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Jong-Wook et al in the IEEE Photonics Technology Letters, vol. 4, No. 8, Aug. 1992.

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