Active solid-state devices (e.g. – transistors – solid-state diode – Responsive to non-electrical signal – Electromagnetic or particle radiation
Patent
1995-05-17
1996-07-30
Crane, Sara W.
Active solid-state devices (e.g., transistors, solid-state diode
Responsive to non-electrical signal
Electromagnetic or particle radiation
257184, 257446, 257448, 257466, H01L 3100
Patent
active
055414389
ABSTRACT:
An improved Metal Semiconductor Metal (MSM) photodiode device and a fabrication process for realizing this device. The improved photodiode device employs frontside electrodes and backside illumination to avoid active area shadowing in the device. This configuration is achieved through a device fabrication sequence which involves substrate removal--and replacement at the device's opposed frontside surface using such media as an epoxy adhesive. The disclosed device uses gallium arsenide semiconductor materials that are lattice determined by an indium phosphide sacrificial initial substrate, in order to select a desired input energy spectral range.
REFERENCES:
patent: 4255212 (1981-03-01), Chappell et al.
patent: 5107318 (1992-04-01), Makiuchi et al.
patent: 5254868 (1993-10-01), Saito
patent: 5494833 (1996-02-01), Martin et al.
Darling et al., "Epitaxial n+ Layer GaAs Mesa-Finger Interdigital Surface Photodetectors," IEEE Electron Device Letters, vol. 10, No. 10, Oct. 1989, pp. 461-463.
Jong-Wook Seo et al., "A Comparative Study of Metal-Semiconductor-Metal Photodetectors on GaAs with Indium-Tin-Oxide and Ti/Au Electrodes," IEEE Photonics Technology Letters, vol. 4, No. 8, Aug. 1992, pp. 888-890.
Lorenzo Joseph P.
Martin Eric A.
Vaccaro Kenneth
Bowers Courtney A.
Crane Sara W.
Hollins Gerald B.
Kundert Thomas L.
The United States of America as represented by the Secretary of
LandOfFree
Backside illuminated MSM device does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Backside illuminated MSM device, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Backside illuminated MSM device will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-1661178