Backside illuminated imaging charge coupled device

Details Backside illuminated imaging charge coupled device Backside illuminated imaging charge coupled device

1981-01-19

1983-12-20

Edlow, Martin H.

357 30, H01L 2978

Patent

active

044220910

ABSTRACT:
An imaging charge coupled device (CCD) is provided which has a support on the non-illuminated, circuit side of a CCD channel layer. The other side of the CCD channel layer (the semiconductor side) is epitaxially joined to an absorber layer of semiconductor which is epitaxially joined to a window layer. This structure is fabricated by growing the epitaxial semiconductor layers (window, absorber, and channel) on a semiconductor substrate, fabricating a CCD circuit on the channel layer, mounting the channel layer to a support, and finally etching off the substrate.

REFERENCES:
patent: 4228365 (1980-10-01), Guiterrez
patent: 4257057 (1981-03-01), Cheung
patent: 4271420 (1981-06-01), Chickamura
patent: 4275407 (1981-06-01), Lorenze

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