Optical waveguides – Integrated optical circuit
Reexamination Certificate
2005-03-08
2005-03-08
Healy, Brian M. (Department: 2883)
Optical waveguides
Integrated optical circuit
C385S129000, C385S131000, C438S031000
Reexamination Certificate
active
06865308
ABSTRACT:
For those optical waveguides that require the deposition of a thick film and a high-temperature anneal to create an appropriate waveguide medium, wafer warping, bowing or dishing is reduced or eliminated by depositing a film of the same thickness on the backside of the wafer so as to relieve film stress during the deposition and annealing process. In one embodiment the waveguide medium is silicon oxynitride, although other depositable thick films may be utilized in place of the silicon oxynitride.
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Conway Timothy J.
McIntyre Thomas J.
Pomerene Andrew T S
BAE Systems Information and Electronic Systems Integration Inc.
Healy Brian M.
Long Daniel J.
Tendler Robert K.
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