Backing plate for contrast enhancement of photolithographic imag

Details Backing plate for contrast enhancement of photolithographic imag Backing plate for contrast enhancement of photolithographic imag

1997-02-05

1999-05-04

Spyrou, Cassandra C.

Optical: systems and elements

Polarization without modulation

Polarization by scattering

359497, 359501, 359485, 355 71, G03B 2772, G02B 530

Patent

active

059009748

ABSTRACT:
A backing plate for a transparent substrate constructed of two polarizer sheets. The axes of polarization of the polarizer sheets are substantially orthogonal to each other. The backing plate thus absorbs more than 98% of incident light and prevents substantial reflection. The backing plate is especially adapted for use with a transparent substrate undergoing any photolithographic process.

REFERENCES:
patent: 4972224 (1990-11-01), Thompson
patent: 5049927 (1991-09-01), Tsushima et al.
patent: 5300972 (1994-04-01), Kamon
patent: 5442184 (1995-08-01), Palmer et al.

Affiliated with

Also associated with

Rating

Backing plate for contrast enhancement of photolithographic imag does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Backing plate for contrast enhancement of photolithographic imag, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Backing plate for contrast enhancement of photolithographic imag will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-1873803