Backing pad

Details Backing pad Backing pad

1995-08-09

1998-08-11

Chen, Vivian

Abrading

Abrading process

Side face of disk

451285, 451287, 451288, 451364, B24B 100, B24B 716, B24B 730, B24B 2900

Patent

active

057919755

ABSTRACT:
A method of fabricating a soft, resilient backing pad adapted for attachment to a pressure plate for planarizing work pieces wherein the outer exposed surface of the pad has been abraded by means of dry abrasive particles fixed on a surface of a spherical convex lapping wheel.

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patent: 5335457 (1994-08-01), Matsuda et al.
patent: 5384988 (1995-01-01), Hernanadez

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