Optics: measuring and testing – Inspection of flaws or impurities – Transparent or translucent material
Patent
1996-11-29
1998-06-09
Font, Frank G.
Optics: measuring and testing
Inspection of flaws or impurities
Transparent or translucent material
356237, G01N 2100
Patent
active
057643539
ABSTRACT:
A method of measuring and monitoring the back side and interior defect density of a wafer from its back side by substantially increasing the back side reflectivity through lapping, etching and controlled back side damage, then measuring defect density with an optical scanner.
REFERENCES:
patent: 4053335 (1977-10-01), Hu
patent: 4141780 (1979-02-01), Kleinknecht et al.
patent: 4410395 (1983-10-01), Weaver et al.
patent: 4547073 (1985-10-01), Kugimiya
patent: 5066359 (1991-11-01), Chiou
patent: 5196716 (1993-03-01), Moriya et al.
Operating Manual, High Yield Technology Inc., Optical Precipitate Profiler, Division of Pacific Scientific Company, Rev. Mar., 1994, pp. 1-1 through 1-6 cover sheet.
Semiconductor Materials & Process Technology Handbook for VLSI & ULSI, Edited by Gary E. McGuire, Noyes Publications, Copyright 1988, pp. v through xiii and two cover sheets.
Silicon Processing, D.C. Gupta, Editor, ASTM STP 804, A symposium sponsored by ASTM Committee F-1 on Electronics, National Bureau of Standards, and Stanford University, San Jose, CA., 19-22 Jan. 1982, Printed in Baltimore, Md (b) Jun. 1983, pp. 5 through 23 with three cover sheets.
Preparation of Samples for Microscopic Examination #7 and Microscopy & Photocopy #8 Chapter #7 was coauthored by Stacy B. Watelski, at least as early Jan. 1, 1996, 187 through 241.
Semiconductor Measurements and Instrumentation, W.R. Runyan, Special Circuits Department, Texas Instruments Incorporated, McGraw-Hill Book Company, Copyright 1975 Editors for this book were Tyler G. Hicks, Lester Strong, & the production supervisor George Dechsner, pp. 21 through 63 with three cover sheets.
Vol. 36, Impurity Diffusion & Gettering in Silicon, Editors Richard B. Fair, Charles W. Pearce, Jack Washburn Symposium held Nov. 27-30, 1984, Boston, Mass. Copyright 1985 by Materials Research Society pp. vii, no number page, 160-174, and two cover sheets.
Brown Eva
Sato Michito
Tate Naoto
Font Frank G.
SEH America Inc.
Stafira Michael P.
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