Batteries: thermoelectric and photoelectric – Photoelectric – Cells
Patent
1995-08-15
1997-04-15
Weisstuch, Aaron
Batteries: thermoelectric and photoelectric
Photoelectric
Cells
257436, 428469, 428472, 20419227, 20419229, 438 72, H01L 3104, H01L 3118, C23C 1434
Patent
active
056205309
ABSTRACT:
An object of the present invention is to provide a back reflector layer having a texture structure with a high reflectivity by preventing oxidation of a metal or alloy base layer, and a method for forming it. A further object is to provide a photovoltaic element with excellent characteristics such as a conversion efficiency, and a process for fabricating it. The back reflector layer has a metal or alloy (hereinafter referred to as a first metal) base layer, and a transparent oxide of a second metal, formed on the first metal. A photovoltaic element is formed by forming a semiconductor junction on the back reflector layer. In the back reflector layer and the photovoltaic element, the electron affinity of the second metal is at least 0.46 eV smaller than that of the first metal, and the transparent oxide is formed by a sputtering method in an atmosphere comprising at least H.sub.2 O and an inert gas and with a target having a composition ratio of the second metal of 1.06 to 1.2 times the stoichiometric composition thereof.
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Canon Kabushiki Kaisha
Weisstuch Aaron
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