Back illuminated photodiode array and method of...

Details Back illuminated photodiode array and method of... Back illuminated photodiode array and method of...

2005-08-23

2005-08-23

Porta, David (Department: 2878)

Radiant energy

Photocells; circuits and apparatus

Photocell controlled circuit

C257S460000

Reexamination Certificate

active

06933489

ABSTRACT:
Disclosed are a back illuminated photodiode array, which is mass-producible and has an ultra-thin high-performance single-sided electrode structure, and a method of manufacturing the same. Both electrodes of a photodiode on a semiconductor substrate1, which are anode and cathode, are collected on one plane of the substrate. The collection of the electrodes is achieved by electrically introducing one of them to the other plane via a hole H penetrating the semiconductor substrate1. The semiconductor substrate1is thinned by polishing, and thus the time for forming the hole H is shortened. Moreover, during the manufacturing process, a supporting plate3is attached to the semiconductor substrate for reinforcing the thinned substrate. Thus, handling of a wafer during the process becomes easy and complies with mass production.

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patent: 6426991 (2002-07-01), Mattson et al.
patent: 2003/0218120 (2003-11-01), Shibayama
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patent: 2001-339057 (2001-12-01), None

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