Back-illuminated CCD imager adapted for contrast transfer functi

Details Back-illuminated CCD imager adapted for contrast transfer functi Back-illuminated CCD imager adapted for contrast transfer functi

1985-05-02

1987-02-10

Munson, Gene M.

Optics: measuring and testing

Lens or reflective image former testing

For optical transfer function

357 24, 357 30, G01M 1100, H01L 2978, H01L 2714, H01L 3100

Patent

active

046419632

ABSTRACT:
Stripe patterns of varying spatial frequency, formed in the top-metalization of a back-illuminated solid-state imager, facilitate on-line measurement of contrast transfer function during wafer-probe testing. The imager may be packaged to allow front-illumination during in-the-field testing after its manufacture.

REFERENCES:
patent: 3925657 (1975-12-01), Levine
patent: 4528596 (1985-07-01), Cope
Hobson Charge-Transfer Devices Edward Arnold, Ltd., London 1978, pp. 162-167.

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