Back grinding methods for fabricating an image sensor

Details Back grinding methods for fabricating an image sensor Back grinding methods for fabricating an image sensor

2007-09-11

2007-09-11

Eley, Timothy V. (Department: 3724)

Abrading

Abrading process

Glass or stone abrading

C438S069000, C451S054000

Reexamination Certificate

active

10956174

ABSTRACT:
Back grinding methods for fabricating an image sensor are disclosed. An example method of back grinding an image sensor comprises: forming a profile anti-deformation film on a micro lens of the image sensor; grinding a backside of a semiconductor substrate of the image sensor; and removing the profile anti-deformation film.

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patent: 6638837 (2003-10-01), Tsao et al.
patent: 6794751 (2004-09-01), Kumamoto
patent: 6808960 (2004-10-01), Yamamoto
patent: 6864172 (2005-03-01), Noma et al.
patent: 6916680 (2005-07-01), Lee et al.
patent: 10-2003-0060603 (2003-07-01), None

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