Axis offset measuring device

Details Axis offset measuring device Axis offset measuring device

1989-10-27

1991-06-04

Rosenberger, Richard A.

Optics: measuring and testing

Angle measuring or angular axial alignment

Alignment of axes nominally coaxial

356399, C30B 1500, G01D 1127

Patent

active

050209078

ABSTRACT:
A device for measuring offset of the axis of a single crystal lifting wire with respect to the axis of rotation of a crucible rotary shaft in a single crystal production apparatus based upon Czochralski method. The apparatus comprises a base plate (16, 16A, 16B) mounted on a table (12) fixed to the upper end of the crucible rotary shaft (10), a weight suspended from the wire (34) and having a stylus projected downward from the lower end thereof or capable of downwardly emitting a laser beam (36C), a device mounted on the base plate and capable of optically detecting the position of said stylus or said laser beam, and a device for displaying the detected position.

REFERENCES:
patent: 3727055 (1973-04-01), David et al.
patent: 4480918 (1984-11-01), DeFazio
patent: 4747454 (1988-05-01), Perryman
Patent Abstracts of Japan, vol. 12, No. 132 (C-490) [2979], 22nd Apr. 1988; & JP-A-62 252 396 (Mitsubishi Metal Corp.) 04-11-1987.
Patent Abstracts of Japan, vol. 8, No. 93 (C-220) [1530], 27th Apr. 1984; & JP-A-59 8697 (Tokyo Shibaura Denki K. K.) 17-01-1984.

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