Auxiliary heater for magnetron sputtering

Details Auxiliary heater for magnetron sputtering Auxiliary heater for magnetron sputtering

1983-11-30

1984-08-21

Demers, Arthur P.

Chemistry: electrical and wave energy

Processes and products

Vacuum arc discharge coating

204298, C23C 1500

Patent

active

044668759

ABSTRACT:
An improved heating means is disclosed for substrates to be coated by cathode sputtering, comprising a radiant heating means used in scanning mode prior to cathode sputtering to heat directly the surface to be coated.

REFERENCES:
patent: 3749662 (1973-07-01), Biehl
patent: 3907660 (1975-09-01), Gillery
patent: 4166018 (1979-08-01), Chapin
patent: 4324631 (1982-04-01), Meckel et al.

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