Autonomous container for the vacuum treatment of an object and i

Details Autonomous container for the vacuum treatment of an object and i Autonomous container for the vacuum treatment of an object and i

1992-03-09

1993-11-09

Reynolds, Bruce A.

Electric heating

Heating devices

Combined with container, enclosure, or support for material...

392418, 414939, 118729, C23C 1600

Patent

active

052605477

ABSTRACT:
An antonomous container permits the vacuum transportation of any random small object and the performance of operations within a container (1) or lock (2), without it being necessary to transfer the object (10) into a working station (3). The container according to the invention is small and is provided with shielding windows (12). Therefore the object (10) can be observed within the container (1) during the operations performed within the said container (1). The latter can be transferred for supplementary operations with respect to the object (10) to the working station (3) by means of a manipulating rod (30). Application to the growth of integrated circuits in microelectronics.

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