Automatically aligning objective aperture for a scanning...

Details Automatically aligning objective aperture for a scanning... Automatically aligning objective aperture for a scanning...

2007-02-06

2007-02-06

Wells, Nikita (Department: 2881)

Radiant energy

Means to align or position an object relative to a source or...

C250S310000, C250S311000, C250S252100

Reexamination Certificate

active

10864709

ABSTRACT:
An automatically aligning objective aperture assembly for a CDSEM includes a plate that is moveable in X and Y directions relative to an electron beam generated by the SEM. The plate defines one or more objective apertures. Encoders and motors are provided for affecting movement of the plate in the X and Y directions. An image controller, responsive to an image of a semiconductor wafer feature focused upon by the electron beam, controls the encoders and motors in a manner which affects movement of the plate to automatically align the objective aperture with the electron beam.

REFERENCES:
patent: 5731580 (1998-03-01), Sato et al.
patent: 6114681 (2000-09-01), Komatsu
patent: 6114682 (2000-09-01), Minakuchi et al.
patent: 6384408 (2002-05-01), Yee et al.
patent: 6838667 (2005-01-01), Tsuneta et al.
patent: 2002/0056808 (2002-05-01), Tsuneta et al.
patent: 2002/0079448 (2002-06-01), Ishitani et al.
patent: 2002/0148961 (2002-10-01), Nakasuji et al.
patent: 2003/0155509 (2003-08-01), Nakasuji et al.
patent: 2004/0135083 (2004-07-01), Kakibayashi et al.
patent: 2004/0173747 (2004-09-01), Dean et al.
patent: 2005/0274908 (2005-12-01), Tsai

Affiliated with

Also associated with

Rating

Automatically aligning objective aperture for a scanning... does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Automatically aligning objective aperture for a scanning..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Automatically aligning objective aperture for a scanning... will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-3819371