Automatically adjustable wafer probe card

Details Automatically adjustable wafer probe card Automatically adjustable wafer probe card

2005-02-15

2005-02-15

Zarneke, David (Department: 2829)

Electricity: measuring and testing

Fault detecting in electric circuits and of electric components

Of individual circuit component or element

C324S754090, C324S1540PB

Reexamination Certificate

active

06856156

ABSTRACT:
An automatically adjustable wafer probe card for the testing of integrated circuits fabricated on a wafer. The wafer probe card includes a pitch shift assembly having a shift block that includes a reserve needle block and an adjacent functional needle block. Multiple probe needles are linearly adjustable on the shift block, and a selected number of the probe needles can be shifted from the reserve needle block to the functional needle block depending on the number of contact pads on the integrated circuit to be contacted by the probe needles of the wafer probe card during the testing process. A selected spacing between the probe needles, or pitch, can be achieved by locating the probe needles at the selected spacings from each other along the functional needle block.

REFERENCES:
patent: 3891924 (1975-06-01), Ardezzone et al.
patent: 4055805 (1977-10-01), Ardezzone
patent: 4471298 (1984-09-01), Frohlich
patent: 6636063 (2003-10-01), Arnold et al.

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