Automatic warp compensation for laminographic circuit board insp

X-ray or gamma ray systems or devices – Specific application – Tomography

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378 62, 378 58, G01N 2304

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active

056872097

ABSTRACT:
An improved laminography system with automatic test object warp compensation that allows for generation of high speed and high resolution X-ray laminographs by using a continuous scan method with two or more linear detectors and one or more collimated X-ray sources. Discrete X-ray images, with different viewing angles, are generated by each detector. The discrete X-ray images are analyzed by a computer to generate Z-axis test object warp compensation parameters based upon the location of a pre-determined feature in the test object. The discrete X-ray images are then combined by a computer using the warp compensation parameters to generate laminographic images of different planes in the object under test, or analyzed in such a manner to derive useful data about the object under test. In one embodiment, the improved scanning laminography system does not require any motion of the source or detectors, but simply a coordinated linear motion of the object under test. Higher speed is achieved over conventional laminography systems due to the continuous nature of the scan; the use of pre-determined features located within the test object to determine warp compensation factors; and the ability to generate any plane of data in the object under test without having to re-image the object.

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