Data processing: generic control systems or specific application – Specific application – apparatus or process – Product assembly or manufacturing
Reexamination Certificate
2009-03-31
2011-11-08
Decady, Albert (Department: 2121)
Data processing: generic control systems or specific application
Specific application, apparatus or process
Product assembly or manufacturing
C700S095000, C700S096000, C700S116000, C700S220000, C700S221000, C700S222000, C702S084000, C414S373000
Reexamination Certificate
active
08055373
ABSTRACT:
An automatic wafer storage system and a method of controlling the system are disclosed. The automatic wafer storage system includes an analysis module and a storage unit. The analysis module estimates the locations between an idle equipment, a transport tool, and the storage unit, so as to control the storage unit and the transport tool to move to the best location for the transport tool to receive wafers from the storage unit. After that, the transport tool carries the wafers to the idle equipment for processing.
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Lai Jung-Pin
Lin Huan-Cheng
De'cady Albert
Inotera Memories, Inc.
Rosenberg , Klein & Lee
Stevens Thomas
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