Automatic wafer processing system and method

Details Automatic wafer processing system and method Automatic wafer processing system and method

1977-03-18

1981-07-14

Nase, Jeffrey V.

Conveyors: fluid current

Having means for maintaining load in suspension along flow path

By load supporting jets

406 72, B65G 5102

Patent

active

042783666

ABSTRACT:
An automatic wafer processing system is modular in format and includes wafer treatment units, storage units and air bearing transport track units which are all of a common module size or an integral multiple thereof. All of these units can then be operatively interconnected in a coplanar configuration to provide an automated wafer flow path. Variation of treatment units can provide many different types of wafer processing in a simple and economical manner. To facilitate such automated system improved variable width air bearing tracks are provided along with a buffer storage unit to accommodate differing process times.

REFERENCES:
patent: 3645581 (1972-02-01), Lasch et al.
patent: 3718371 (1973-02-01), Lasch
patent: 3812947 (1974-05-01), Nygaard
patent: 3930684 (1976-01-01), Lasch et al.
patent: 3976330 (1976-08-01), Babinski et al.
patent: 4015880 (1977-04-01), Colvin et al.
IBM Technical Disclosure Bulletin--Mack et al.--vol. 16, No. 9--Feb. 1974--p. 2907.
IBM Technical Disclosure Bulletin--Hanscom et al.--vol. 18, No. 11--Apr. 1976--p. 3691.
IBM Technical Disclosure Bulletin--Caccoma et al.--vol. 17, No. 6--Nov. 1974--p. 1604.

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