Automatic wafer processing system and method

Details Automatic wafer processing system and method Automatic wafer processing system and method

1980-12-11

1982-10-05

Nase, Jeffrey V.

Conveyors: fluid current

Having means for maintaining load in suspension along flow path

By load supporting jets

B65G 5102

Patent

active

043526071

ABSTRACT:
An automatic wafer processing system is modular in format and includes wafer treatment units, storage units and air bearing transport track units which are all operatively interconnected in a coplanar configuration to provide an automated wafer flow path. To facilitate such automated system improved variable width air bearing tracks are provided by flexible strips in slots.

REFERENCES:
IBM Technical Disclosure Bulletin; vol. 16, No. 9; p. 2907; Mack et al.; Feb. 1974.

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